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  1. DIGILEM - Interferometric Endpoint Detector & Thin Film Monitor

    Interferometry is a powerful technique that can be used for endpoint detection of planar layer and trench etching, or deposition
    plasma2
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    semiconductors2
    deposition2
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    interferometry1
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    interferometers1
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    endpointer1
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    etch rate1
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    Digilem0
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    semiconductor characterisation0

    www.digilem.com - 2009-02-08

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